Silane (SiH₄)
Can be measured with:
✓ messbar mit dem air-Q Science auf Anfrage.
air-Qs with a sensor for Silane
Formation/Occurrence:
Industrial production; CVD processes, thin-film solar cells.
Limit Values:
Workplace limit values exist; the primary hazard is spontaneous ignition/explosion.
Effects:
Risk of burns/explosion; inhaling decomposition products irritates the respiratory tract.
Safety:
Inert gas purging, exhaust gas combustion/scrubbing, leak detection.
More measured values / sensors
Custom Sensor Custom Sensor Infrasound Infrasound H₂ Hydrogen VOC Volatile Organic Compounds C₄H₈S Tetrahydrothiophene T Air Temperature Td Dew Point NO Nitric Oxide NO₂ Nitrogen Dioxide SiH₄ Silane H₂Se Hydrogen Selenide H₂S Hydrogen Sulfide SO₂ Sulfur Dioxide O₂ Oxygen Rn Radon C₃H₆ Propylene COCl₂ Phosgene O₃ Ozone PH₃ Phosphine CH₄S Methanethiol / Methyl Mercaptan CH₄ Methane Merlin's Test Substance Merlin's Test Substance ρ Relative Humidity φ Absolute Humidity p Air Pressure lx Light / Illuminance Lp_max Noise Peak Level Lp Noise N₂O Nitrous Oxide (Dinitrogen Monoxide) CO Carbon Monoxide CO₂ Carbon Dioxide C₄H₁₀ Isobutane PID Industrial VOC Sensor N₂H₄ Hydrazine CH₂O Formaldehyde HF Hydrogen Fluoride F₂ Fluorine Particulate Matter Particle Count Particulate Matter Particle Count PM₁ – PM₂.₅ – PM₁₀ Particulate Matter C₂H₄O Ethylene Oxide C₂H₆ Ethane B₂H₆ Diborane ClO₂ Chlorine Dioxide Cl₂ Chlorine / Chlorine Gas C₄H₁₀ Butane HBr Hydrogen Bromide Br₂ Bromine HCN Hydrogen Cyanide AsH₃ Arsine NH₃ Ammonia Alcohols Alcohols
